Silicon Microstructures SM9541 MEMS Low Pressure Sensor

Silicon Microstructures SM9541 MEMS low pressure sensor offers a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 with a dual vertical porting option. It is available in both compound gauge or differential pressure configurations. With the dual porting, a vacuum-gauge measurement is possible to minimize altitude errors due to changes in ambient pressure. Combining the pressure sensor with a signal-conditioning ASIC in a single package simplifies the use of advanced silicon micro-machined pressure sensors. The pressure sensor can be mounted directly on a standard printed circuit board and a high level, calibrated pressure signal can be acquired from the digital interface. This eliminates the need for additional circuitry, such as a compensation network or microcontroller containing a customer correction algorithm.