MKS四极质谱分析仪  残余气体分析仪(RGA) Micro Vision 2

Micro Vision 2是MKS RGA技术的产品，设计用于满足传统RGA的运用，并具备比前一代质谱更高的数据采集速度。它甚至能在宽动态范围的扫描上，每组数据的采集都是毫秒级的。这个能力不需要牺牲RGA任何的性能。

这也是MKS的RGA为什么能在半导体，离子加速器方面一直处于领先地位的原因之一。

Residual Gas Analyzers (RGA) — For general residual gas analysis, the performance of the MicroVision 2 RGA makes it the ideal choice for many applications, including ultra high vacuum (UHV) such as vacuum coatings, accelerators and high energy physics. The web-enabled e-Vision 2 RGA represents a significant advance in technology, opening up new possibilities for vacuum monitoring and e-diagnostics. With an unprecedented range of instrument control options, e-Vision 2 is designed to make vacuum troubleshooting and monitoring easy and straightforward. High Pressure Residual Gas Analyzers — The HPQ3 allows operation far beyond the 1e-4 mbar total pressure limit of other residual gas analyzers, without the need for differential pumping. Field-proven technology, coupled with the latest innovative electronics platform derived from the Microvision 2 family, give data quality not previously seen in this

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